Chemical elemental analysis

by Energy-dispersive X-ray spectroscopy (EDX)

Energy-dispersive X-ray spectroscopy (EDX)

Chemical characterization in the scanning electron microscope (SEM) is performed non-destructively with energy dispersive X-ray analysis (EDX). The electron beam stimulate the atoms in the sample with uniform energy and they instantaneously send out X-rays of specific energies for each element, the so called characteristic X-rays. This radiation gives information about the elemental composition of the sample. Chemical elements starting with the atomic number 6 (carbon) can be determined with this analysis method.

EDX Mapping (Element distribution images)

EDX mapping provides in addition to the conventional SEM image a meaningful picture of the element distribution of a surface. The acquisition times for a satisfactory resolution and noise performance can take from 30 minutes to 12 hours, because a complete EDX spectrum is made from each image point.

SEM image